Hitachi SU8230 is an ultra-high resolution cold-field emission SEM that has been improved for sensitive materials and nanostructures. The newly-designed Hitachi CFE gun complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability. The system is equipped with Bruker QUANTAX FlatQUAD detector which achieves maximum solid angle in EDS and provides unrivaled mapping performance, even for the most difficult samples.

The SU8230 features

1.High contrast imaging at ultra-low dose with the immersion lens detection system

2.Sub-nanometer resolution is obtained even below 1 kV

3.Extremely fast mapping using only moderate beam currents

4.Superfast, high sensitivity EDS can be achieved with the help of annular detectors with >1 sr solid angle